SHELL-BODY FABRICATION FOR MICROMACHINES

被引：15

作者：

SUZUKI, H

OHYA, N

KAWAHARA, N

YOKOI, M

OHYANAGI, S

KURAHASHI, T

HATTORI, T

机构：

[1] Research Laboratories, Nippondenso Co Ltd., Aichi, 470-01

来源：

JOURNAL OF MICROMECHANICS AND MICROENGINEERING | 1995年 / 5卷 / 01期

关键词：

Automobile bodies - Electric motors - Etching - Gold plating - Integrated circuit manufacture - Model automobiles - Nickel plating - Numerical control systems;

D O I：

10.1088/0960-1317/5/1/007

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The shell body of a 1/1000 scale car was fabricated by numerically controlled NC machining, integrated circuit compatible processing and micro-electro-discharge processing as an experimental model of a micromachine. The gold-plated nickel body is 30 mu m thick, 4.8 mm long, 1.8 mm wide and 1.8 mm high. In the shell body, a 0.7 mm diameter motor is installed, The body powered by the electromagnetic motor runs at the speed of 100 mm/sec. The body and parts are fabricated as a miniature of a full scale model car by those techniques. Those microparts were assembled with a micromanipulator. This demonstration indicates the possibility for complex 3-dimensional machining.

引用

页码：36 / 40

页数：5

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