共 15 条
[3]
ANGULAR-DISTRIBUTIONS OF SPUTTERED PARTICLES
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS,
1986, 4 (03)
:1218-1221
[5]
GARRISON BJ, UNPUB
[6]
SURFACE EJECTION IN SINGLE-CRYSTAL SPUTTERING
[J].
CANADIAN JOURNAL OF PHYSICS,
1975, 53 (16)
:1513-1523
[7]
KOBRIN PH, REV SCI INSTRUM
[9]
LO D, UNPUB
[10]
ROOSENDAAL HE, 1980, P S SPUTTERING VIENN