CRYSTAL ORIENTATION OF YBA2CU3O7-Y THIN-FILMS PREPARED BY RF-SPUTTERING

被引：26
作者：
ARIKAWA, T
ITOZAKI, H
HARADA, K
HIGAKI, K
TANAKA, S
YAZU, S
机构：
[1] Itami Research Laboratories, Sumitomo Electric Industries
来源：
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS | 1990年 / 29卷 / 12期
关键词：
OXIDE SUPERCONDUCTOR; YBA2CU3O7-Y THIN FILM; SPUTTERING; CRYSTAL ORIENTATION; MORPHOLOGY; SUBSTRATE TEMPERATURE;
D O I：
10.1143/JJAP.29.L2199
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
The effect of growth temperature on the crystallinity and morphology of YBa2Cu3O7-y thin films was investigated. Thin films were grown on MgO (100) single-crystal substrates by RF magnetron sputtering. Preferred orientations of thin films can be controlled by adjusting the substrate temperature, T(s); (100) a-axis oriented films were deposited at 540-degrees-C < T(s) < 550-degrees-C, (110) oriented films were deposited at 565-degrees-C < T(s) < 600-degrees-C and (001) c-axis oriented films were deposited above 610-degrees-C.
引用
收藏
页码：L2199 / L2202
页数：4
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