PREPARATION AND PROPERTIES OF HYDROGENATED AMORPHOUS-SILICON FILMS BY GLOW-DISCHARGE DECOMPOSITION OF SILANE IN CASCADE REACTORS

被引：7
作者：
DIXIT, PN
BHATTACHARYA, R
PANWAR, OS
SHAH, VV
机构：
来源：
APPLIED PHYSICS LETTERS | 1984年 / 44卷 / 10期
关键词：
D O I：
10.1063/1.94623
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
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页码：991 / 993
页数：3
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