NOVEL POLYMERIC DISSOLUTION INHIBITOR FOR THE DESIGN OF SENSITIVE, DRY ETCH RESISTANT, BASE-DEVELOPABLE RESIST

被引：35

作者：

ITO, H

FLORES, E

RENALDO, AF

机构：

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1988年 / 135卷 / 09期

关键词：

D O I：

10.1149/1.2096264

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

页码：2328 / 2333

页数：6

共 22 条

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