OBSERVATIONS OF SPUTTERING DAMAGE USING FIELD-ION MICROSCOPE

被引：13

作者：

WALLS, JM

SOUTHWORTH, HN

BRAUN, E

机构：

[1] UNIV BIRMINGHAM,DEPT PHYS MET & SCI MAT,POB 363,BIRMINGHAM B15 2TT,ENGLAND

[2] UNIV ASTON,DEPT PHYS,GOSTA GREEN,BIRMINGHAM B4 7ET,ENGLAND

来源：

关键词：

D O I：

10.1016/0042-207X(74)90008-6

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：471 / 474

页数：4

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