THIN-FILM AL DIAMOND SCHOTTKY DIODE OVER 400-V BREAKDOWN VOLTAGE

被引:24
作者
JENG, DG [1 ]
TUAN, HS [1 ]
SALAT, RF [1 ]
FRICANO, GJ [1 ]
机构
[1] VACTRON LAB EQUIPMENT INC,BOHEMIA,NY 11716
关键词
D O I
10.1063/1.346940
中图分类号
O59 [应用物理学];
学科分类号
摘要
Diamond Schottky diodes were developed by growing diamond film (DF) on n-type silicon followed by evaporating aluminum (Al) contacts on the top of the DF. A high breakdown voltage (over 400 V) and a high forward-to-reverse current ratio (IF/IR over 105) have been observed. In spite of the high internal resistance, an ideality factor of 1.85 was determined.
引用
收藏
页码:5902 / 5904
页数:3
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