DETERMINATION OF MINORITY-CARRIER GENERATION LIFETIME IN BEAM-RECRYSTALLIZED SILICON-ON-INSULATOR STRUCTURE BY USING A DEPLETION-MODE TRANSISTOR

被引:20
作者
VU, DP
PFISTER, JC
机构
关键词
D O I
10.1063/1.95939
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
收藏
页码:950 / 952
页数:3
相关论文
共 13 条
[1]   FIELD-EFFECT IN LARGE GRAIN POLYCRYSTALLINE SILICON [J].
COLINGE, JP ;
MOREL, H ;
CHANTE, JP .
IEEE TRANSACTIONS ON ELECTRON DEVICES, 1983, 30 (03) :197-201
[2]   TECHNIQUES FOR PRODUCING DEFECT-FREE SOI BY DUAL ELECTRON-BEAM HEATING OF DEPOSITED POLYSILICON [J].
DAVIS, JR ;
MCMAHON, RA ;
AHMED, H .
JOURNAL DE PHYSIQUE, 1983, 44 (NC-5) :337-341
[3]   MICROANALYSIS OF SINGLE-CRYSTAL SI RECRYSTALLIZED USING HALOGEN LAMPS [J].
HAOND, M ;
VU, DP ;
BENSAHEL, D ;
DUPUY, M .
JOURNAL OF APPLIED PHYSICS, 1983, 54 (07) :3892-3896
[4]  
HAOND M, 1985, 1985 MAT RES SOC EUR
[5]  
RONZANI D, 1985, 1985 MAT RES SOC EUR
[6]   INTERPRETATION OF SURFACE AND BULK EFFECTS USING PULSED MIS CAPACITOR [J].
SCHRODER, DK ;
GULDBERG, J .
SOLID-STATE ELECTRONICS, 1971, 14 (12) :1285-+
[7]   IMPROVED TECHNIQUES FOR GROWTH OF LARGE-AREA SINGLE-CRYSTAL SI SHEETS OVER SIO2 USING LATERAL EPITAXY BY SEEDED SOLIDIFICATION [J].
TSAUR, BY ;
FAN, JCC ;
GEIS, MW ;
SILVERSMITH, DJ ;
MOUNTAIN, RW .
APPLIED PHYSICS LETTERS, 1981, 39 (07) :561-563
[8]   EFFECTS OF SUBGRAIN BOUNDARIES ON CARRIER TRANSPORT IN ZONE-MELTING-RECRYSTALLIZED SI FILMS ON SIO2-COATED SI SUBSTRATES [J].
TSAUR, BY ;
FAN, JCC ;
GEIS, MW ;
SILVERSMITH, DJ ;
MOUNTAIN, RW .
ELECTRON DEVICE LETTERS, 1982, 3 (04) :79-82
[9]   MICROSECOND CARRIER LIFETIMES IN SI FILMS PREPARED ON SIO2-COATED SI SUBSTRATES BY ZONE-MELTING RECRYSTALLIZATION AND BY SUBSEQUENT EPITAXIAL-GROWTH [J].
TSAUR, BY ;
FAN, JCC ;
GEIS, MW .
APPLIED PHYSICS LETTERS, 1982, 41 (01) :83-85
[10]   HALOGEN LAMP RECRYSTALLIZATION OF SILICON ON INSULATING SUBSTRATES [J].
VU, DP ;
HAOND, M ;
BENSAHEL, D ;
DUPUY, M .
JOURNAL OF APPLIED PHYSICS, 1983, 54 (01) :437-439