SUPPRESSION OF PLATINUM PENETRATION FAILURE IN TI/PT/AU BEAM LEAD METAL SYSTEMS USING A TIN DIFFUSION BARRIER

被引：13
作者：
KANAMORI, S
MATZUMOTO, T
机构：
来源：
THIN SOLID FILMS | 1983年 / 110卷 / 03期
关键词：
D O I：
10.1016/0040-6090(83)90238-9
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
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页码：205 / 213
页数：9
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