共 20 条
[2]
CHEUNG NW, 1980, P S THIN FILM INTERF, V80, P323
[3]
FOURNIER PR, 1975, Patent No. 3879746
[5]
Hansen M., 1958, J ELECTROCHEM SOC, DOI DOI 10.1149/1.2428700
[7]
EFFECTS OF TITANIUM LAYER AS DIFFUSION BARRIER IN TI/PT/AU BEAM LEAD METALLIZATION ON POLYSILICON
[J].
IEEE TRANSACTIONS ON COMPONENTS HYBRIDS AND MANUFACTURING TECHNOLOGY,
1982, 5 (03)
:318-321