GROWTH OF IN1-XGAXSB AND IN1-XALXSB FILMS BY MULTI-TARGET RF SPUTTERING

被引：16

作者：

GREENE, JE

WICKERSHAM, CE

ZILKO, JL

机构：

[1] UNIV ILLINOIS,DEPT MET,URBANA,IL 61801

[2] UNIV ILLINOIS,COORDINATED SCI LAB,URBANA,IL 61801

来源：

THIN SOLID FILMS | 1976年 / 32卷 / 01期

关键词：

D O I：

10.1016/0040-6090(76)90553-8

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：51 / 54

页数：4

共 10 条

[1] GAAS, GAP, AND GAASXP1-X EPITAXIAL FILMS GROWN BY MOLECULAR BEAM DEPOSITION [J].

ARTHUR, JR ;

LEPORE, JJ .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1969, 6 (04) :545-&

[2]

CHU L, 1973, IEEE T PARTS HYBRIDS, V9, P208

[3] PBXSN1-XTE LAYERS BY RF MULTICATHODE SPUTTERING [J].

CORSI, C .

JOURNAL OF APPLIED PHYSICS, 1974, 45 (08) :3467-3471

[4]

DZHANELIDZE RB, 1963, SOV PHYS-SOL STATE, V5, P501

[5]

Khan I. M., 1970, HDB THIN FILM TECHNO, P10

[6]

NEUBERGER M, 1972, 3-5 TERNARY SEMICOND

[7] OPTICAL PROPERTIES OF MULTISOURCE THERMALLY EVAPORATED 3-5 SEMICONDUCTOR COMPOUNDS [J].

POTTER, RF .

APPLIED OPTICS, 1966, 5 (01) :35-&

[8]

WEIDER HH, 1970, INTERMETALLIC SEMICO

[9]

WICKERSHAM CE, 1975, THESIS U ILLINOIS

[10] SPUTTERING OF CDXHG1-XTE FILMS IN MERCURY VAPOR PLASMA [J].

ZOZIME, A ;

SELLA, C ;

COHENSOL.G .

THIN SOLID FILMS, 1972, 13 (02) :373-378

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