SHAPE MEASUREMENT OF WORKPIECE SURFACE WITH ZONE-PLATE INTERFEROMETER DURING MACHINE RUNNING

被引：7

作者：

NOMURA, T

MIYASHIRO, H

KAMIYA, K

YOSHIKAWA, K

TASHIRO, H

SUZUKI, M

USUKI, M

KOBAYASHI, F

机构：

[1] Department of Mechanical Systems Engineering, Toyama Prefectural University, Toyama

[2] Department of Mechanical Systems Engineering, Toyama University, Toyama

[3] Nagoya College of Creative Art, Aichi

[4] Nachi-Fujikoshi Co., Ltd., Toyama

[5] Fuji Photo Optical Co., Ltd., Saitama

来源：

PRECISION ENGINEERING-JOURNAL OF THE AMERICAN SOCIETY FOR PRECISION ENGINEERING | 1993年 / 15卷 / 02期

关键词：

ZONE-PLATE INTERFEROMETER; SHAPE MEASUREMENT; ON-MACHINE MEASUREMENT; MEASUREMENT DURING WORKPIECE TURNING; ULTRAPRECISION CUTTING MACHINE;

D O I：

10.1016/0141-6359(93)90342-8

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

A zone-plate interferometer is in the family of common-path interferometers that have the following feature: interference fringes are hardly influenced by air turbulence and machine vibrations. A new zone-plate interferometer with a three-dimensional optical system is developed in order to measure the shape error of spherical and aspherical mirrors manufactured with an ultraprecision cutting machine. Shape measurements of the mirrors are performed when they are turning at a speed of 900 rpm. The position of a zone-plate is arranged quickly and easily by using a Moire technique. The results obtained with the zone-plate interferometer agree well with those obtained with a Fizeau interferometer.

引用

页码：86 / 92

页数：7

共 6 条

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[2]

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[3]

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[4]

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[6]

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