2 TYPES OF MEV ION-BEAM ENHANCED ADHESION FOR AU FILMS ON SIO2

被引：25

作者：

WIE, CR

SHI, CR

MENDENHALL, MH

LIVI, RP

VREELAND, T

TOMBRELLO, TA

机构：

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1985年 / 9卷 / 01期

关键词：

D O I：

10.1016/0168-583X(85)90771-2

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：20 / 24

页数：5

共 10 条

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[4]

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[7]

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[8] FAST CHEMISTRY IN ION WAKES [J].

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INTERNATIONAL JOURNAL OF MASS SPECTROMETRY AND ION PROCESSES, 1983, 53 (SEP) :307-316

[9]

TOMBRELLO TA, 1984, THIN SOLID FILMS

[10] ENHANCED ADHESION FROM HIGH-ENERGY ION IRRADIATION [J].

WERNER, BT ;

VREELAND, T ;

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QUI, Y ;

TOMBRELLO, TA .

THIN SOLID FILMS, 1983, 104 (1-2) :163-166

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