DETERMINATION OF THE HYDROGEN CONTENT IN AMORPHOUS LANI5 FILMS USING A QUARTZ-CRYSTAL MASS-MONITORING METHOD

被引：26

作者：

SAKAGUCHI, H ^{[1
]}

TANIGUCHI, N ^{[1
]}

NAGAI, H ^{[1
]}

NIKI, K ^{[1
]}

ADACHI, G ^{[1
]}

SHIOKAWA, J ^{[1
]}

机构：

[1] OSAKA UNIV,FAC ENGN,DEPT APPL CHEM,SUITA,OSAKA 565,JAPAN

来源：

JOURNAL OF PHYSICAL CHEMISTRY | 1985年 / 89卷 / 25期

关键词：

D O I：

10.1021/j100271a048

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

引用

页码：5550 / 5552

页数：3

共 16 条

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