PHASE-LOCKED 2-DIMENSIONAL ARRAYS OF IMPLANT ISOLATED VERTICAL CAVITY SURFACE EMITTING LASERS

被引：7

作者：

YOO, HJ ^{[1
]}

HAYES, JR ^{[1
]}

PAEK, EG ^{[1
]}

HARBISON, JP ^{[1
]}

FLOREZ, LT ^{[1
]}

KWON, YS ^{[1
]}

机构：

[1] KAIST,DEPT ELECT ENGN,SEOUL,SOUTH KOREA

来源：

ELECTRONICS LETTERS | 1990年 / 26卷 / 23期

关键词：

Laser arrays; Semiconductor lasers;

D O I：

10.1049/el:19901258

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The fabrication and characterisation of two-dimensional phase-locked arrays of vertical cavity surface emitting lasers is reported. The three two-dimensional array structures characterised were a 2 x 3 periodic array of 10/mi2 lasers, a hexagonal array and a centred hexagonal array of 5/mi hexagonal lasers. AH arrays were fabricated using the same technique which was a combination of mesa etching and oxygen implantation isolation. © 1990, The Institution of Electrical Engineers. All rights reserved.

引用

页码：1944 / 1946

页数：3

共 5 条

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[4] FABRICATION OF A 2-DIMENSIONAL PHASED-ARRAY OF VERTICAL-CAVITY SURFACE-EMITTING LASERS [J].

YOO, HJ ;

SCHERER, A ;

HARBISON, JP ;

FLOREZ, LT ;

PAEK, EG ;

VANDERGAAG, BP ;

HAYES, JR ;

VONLEHMEN, A ;

KAPON, E ;

KWON, YS .

APPLIED PHYSICS LETTERS, 1990, 56 (13) :1198-1200

[5]

YOO HJ, 1990, IEEE J QUANTUM ELECT

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