RATE OF PRODUCTION OF WATER-VAPOR IN LOW-POWER, HIGH-REPETITION-RATE DISCHARGE CLEANING

被引：12

作者：

MATSUZAKI, Y

SUZUKI, N

HIRAYAMA, T

机构：

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1986年 / 25卷 / 02期

关键词：

D O I：

10.1143/JJAP.25.253

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：253 / 257

页数：5

共 29 条

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