THE ROLE OF SPUTTERING AND DISPLACEMENT DAMAGE IN THE ELECTRON SCRIBE PROCESS

被引：18

作者：

MEDLIN, DL ^{[1
]}

HOWITT, DG ^{[1
]}

机构：

[1] UNIV CALIF DAVIS,DEPT MECH AERONAUT & MAT ENGN,DAVIS,CA 95616

来源：

PHILOSOPHICAL MAGAZINE LETTERS | 1991年 / 64卷 / 03期

关键词：

D O I：

10.1080/09500839108214679

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

A calculation of the surface erosion and vacancy injection that is produced in thin-foil specimens under high-energy electron irradiation is described. Two distinct types of damage behaviour can be predicted which depend upon the relative magnitudes of the sputtering and vacancy-enhanced displacement cross-sections. When sputtering dominates, uniform thinning from the electron exit side of the foil is predicted, but when vacancy-enhanced displacement dominates, vacancy injection is predicted.

引用

页码：133 / 141

页数：9

共 17 条

[1] ELECTRON ENERGY-LOSS SPECTROSCOPY STUDIES OF NANOMETER-SCALE STRUCTURES IN ALUMINA PRODUCED BY INTENSE ELECTRON-BEAM IRRADIATION [J].

BERGER, SD ;

SALISBURY, IG ;

MILNE, RH ;

IMESON, D ;

HUMPHREYS, CJ .

PHILOSOPHICAL MAGAZINE B-PHYSICS OF CONDENSED MATTER STATISTICAL MECHANICS ELECTRONIC OPTICAL AND MAGNETIC PROPERTIES, 1987, 55 (03) :341-358

[2] IRRADIATION DAMAGE IN NICKEL AND IRON IN A HIGH-VOLTAGE ELECTRON MICROSCOPE AND THRESHOLD ENERGY DETERMINATION [J].

BOURRET, A .

PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 1971, 4 (03) :813-&

[3]

BRADLEY CR, 1988, ANL8848 REP

[4]

BULLOUGH TJ, 1990, I PHYSICS C SERIES, V98, P267

[5] SPUTTERING OF GOLD FOILS IN A HIGH-VOLTAGE ELECTRON-MICROSCOPE - COMPARISON OF THEORY AND EXPERIMENT [J].

CHERNS, D ;

FINNIS, MW ;

MATTHEWS, MD .

PHILOSOPHICAL MAGAZINE, 1977, 35 (03) :693-714

[6]

CHERNS D, 1975, FUNDAMENTAL ASPECTS, P178

[7]

HOHENSTEIN M, 1989, J NUCL MATER, V169, P178

[8]

HOLLENBECK JL, 1986, MATERIAL RES SOC S P, V72, P289

[9]

Humphreys C. J., 1985, I PHYS C SER, V78, P1

[10]

KENIK EA, 1978, IRRADIATION EFFECTS, P23

← 1 2 →