INTERFACE FORMATION DURING THIN FILM DEPOSITION

被引：97
作者：
MATTOX, DM
MCDONALD, JE
机构：
来源：
JOURNAL OF APPLIED PHYSICS | 1963年 / 34卷 / 08期
关键词：
D O I：
10.1063/1.1702776
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
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页码：2493 / &
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