ELECTROMAGNETIC MICRORELAYS - CONCEPTS AND FUNDAMENTAL CHARACTERISTICS

被引：40

作者：

HOSAKA, H

KUWANO, H

YANAGISAWA, K

机构：

[1] Interdisciplinary Research Laboratories, Nippon Telegraph and Telephone Corporation, Musashino-shi, Tokyo, 180

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 1994年 / 40卷 / 01期

关键词：

D O I：

10.1016/0924-4247(94)85028-3

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

An electromagnetic microrelay is proposed as a practical application of microelectrochemical system (MEMS) technology and the basic performance of its key components is evaluated. The contact resistance and breakdown voltage of contact electrodes are measured for very small loads and gaps. The static and dynamic deflection of the contact springs is measured for Very small movements. Based on these experimental results, design guidelines for key components are proposed. Two prototypes that partly use MEMS technology are produced and their switching performance is demonstrated. One prototype uses a flat microspring with a length and width of 0.3 mm; its switching speed is more than ten times that of a conventional relay. The other is a 2X2 matrix relay, with four self-latching switches; each switch has two stable positions, open and closed, and is driven by a current pulse. This component study and prototype development verify the suitability of MEMS technology for mechanical relays.

引用

页码：41 / 47

页数：7

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