LPCVD OF BOROPHOSPHOSILICATE GLASS FROM ORGANIC REACTANTS

被引：40

作者：

WILLIAMS, DS ^{[1
]}

DEIN, EA ^{[1
]}

机构：

[1] AT&T BELL LABS,ALLENTOWN,PA 18103

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1987年 / 134卷 / 03期

关键词：

D O I：

10.1149/1.2100527

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

页码：657 / 664

页数：8

共 27 条

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