ION-BOMBARDMENT INDUCED MIXING OF OXYGEN-EXPOSED SOLID-SURFACES DURING SPUTTERING

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SAIDOH, M
YAMADA, R
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NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1988年 / 33卷 / 1-4期
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TH7 [仪器、仪表];
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0804 ; 080401 ; 081102 ;
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页码：669 / 673
页数：5
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