METHANE FORMATION AND SURFACE MODIFICATION OF TIC COATING BY HYDROGEN-ION BOMBARDMENT

被引：10

作者：

SUKENOBU, S

GOMAY, Y

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1983年 / 1卷 / 02期

关键词：

D O I：

10.1116/1.572151

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：920 / 923

页数：4

共 9 条

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[2]

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[6] METHANE FORMATION AND SURFACE MODIFICATION OF TIC COATING BY HYDROGEN-ION BOMBARDMENT [J].

SUKENOBU, S ;

GOMAY, Y .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1983, 1 (02) :920-923

[7]

ULICKSON M, 1980, THIN SOLID FILMS, V73, P133

[8] CHEMICAL SPUTTERING YIELDS OF TITANIUM CARBIDES [J].

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[9]

AUGER ELECTRON SPECT

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