DIFFERENTIAL SPUTTERING CORRECTION FOR ION MICROSCOPY WITH IMAGE DEPTH PROFILING

被引:29
作者
PATKIN, AJ [1 ]
CHANDRA, S [1 ]
MORRISON, GH [1 ]
机构
[1] CORNELL UNIV, DEPT CHEM, BAKER LAB CHEM, ITHACA, NY 14853 USA
关键词
D O I
10.1021/ac00251a023
中图分类号
O65 [分析化学];
学科分类号
070302 ; 081704 ;
摘要
引用
收藏
页码:2507 / 2510
页数:4
相关论文
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