CORRECTION OF APERTURE ABERRATION OF A PROBE-FORMING QUADRUPOLE TRIPLET

被引:0
作者
OKAYAMA, S [1 ]
机构
[1] ELECTROTECH LAB,SAKURA,IBARAKI 305,JAPAN
来源
JOURNAL OF ELECTRON MICROSCOPY | 1991年 / 40卷 / 04期
关键词
D O I
暂无
中图分类号
TH742 [显微镜];
学科分类号
摘要
引用
收藏
页码:256 / 256
页数:1
相关论文
共 50 条
[21]   Aberration properties of the quadrupole triplet with a line source for a micro-probe optics [J].
Yamazaki, Y. ;
Miyoshi, M. .
Optik (Jena), 1994, 96 (02) :78-82
[22]   One-stage probe-forming systems with quadrupole lenses excited by individual power supplies [J].
Ponomarova, A. A. ;
Melnik, K. I. ;
Vorobjov, G. S. ;
Ponomarev, A. G. .
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 2011, 269 (20) :2202-2205
[23]   A NEW SHADOW-IMAGE METHOD FOR MEASUREMENTS OF SPHERICAL-ABERRATION COEFFICIENT OF THE PROBE-FORMING LENS [J].
HANAI, T ;
HIBINO, M ;
MARUSE, S .
JOURNAL OF ELECTRON MICROSCOPY, 1986, 35 (01) :103-103
[24]   DESIGN PARAMETERS OF AN UNCONVENTIONAL PROBE-FORMING LENS [J].
JUMA, SM .
JOURNAL OF PHYSICS E-SCIENTIFIC INSTRUMENTS, 1986, 19 (06) :457-462
[25]   Comparison Of Electromagnetic, Electrostatic And Permanent Magnet Quadrupole Lens Probe-Forming Systems For High Energy Ions [J].
Dymnikov, Alexander D. ;
Glass, Gary A. .
APPLICATION OF ACCELERATORS IN RESEARCH AND INDUSTRY: TWENTY-FIRST INTERNATIONAL CONFERENCE, 2011, 1336 :248-252
[26]   COMPARISON OF THE ION-OPTICAL CHARACTERISTICS OF CONVENTIONAL QUADRUPOLE PROBE-FORMING LENSES IN THE NUCLEAR SCANNING MICROPROBE SYSTEM [J].
Ponomarova, A. A. ;
Vorobjov, G. S. ;
Barsuk, I. V. .
2014 24TH INTERNATIONAL CRIMEAN CONFERENCE MICROWAVE & TELECOMMUNICATION TECHNOLOGY (CRIMICO), 2014, :742-743
[27]   The beam control in quadrupole probe-forming systems with allowance of correlation between angular distribution and energy spread of charged particles [J].
Ponomarev, A. G. ;
Miroshnichenko, V. I. ;
Storizhko, V. E. .
PROCEEDINGS OF THE SEVENTH INTERNATIONAL CONFERENCE ON CHARGED PARTICLE OPTICS (CPO-7), 2008, 1 (01) :99-104
[28]   Optimal collimation of a charged particle beam in probe-forming systems [J].
A. G. Ponomarev .
Technical Physics, 2009, 54 :276-280
[29]   PROBE-FORMING ELECTRON-BEAM SYSTEMS AS LITHOGRAPHIC TOOLS [J].
PFEIFFER, HC ;
LANGNER, GO .
OPTIK, 1992, 92 (02) :89-96
[30]   NEW IMAGING AND DEFLECTION CONCEPT FOR PROBE-FORMING MICROFABRICATION SYSTEMS [J].
PFEIFFER, HC .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1975, 12 (06) :1170-1173