ANALYSIS AND OPTIMIZATION OF CLOSED-LOOP VACUUM CONTROL-SYSTEMS

被引：2

作者：

FERRAN, RJ

SULLIVAN, JJ

机构：

[1] MKS INSTR INC,BURLINGTON,MA 01803

[2] GRANVILLE PHILLIPS CO,BOULDER,CO 80303

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1975年 / 12卷 / 01期

关键词：

D O I：

10.1116/1.568609

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：560 / 563

页数：4

共 6 条

[1]

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[2]

GRAHAM D, 1954, T AIEE, V73, P10

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LANDFORS, AA .

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[4] ADVANCES IN DIFFUSION PUMP TECHNOLOGY [J].

HABLANIAN, MH ;

MALIAKAL, JC .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1973, 10 (01) :58-64

LAMONT, LT .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1973, 10 (01) :251-253

[6] VACUUM SYSTEMS FOR SPUTTERING [J].

SHIRN, GA ;

PATTERSON, WL .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1970, 7 (03) :453-+