CHARACTERIZATION OF PLASMA-DEPOSITED STYRENE FILMS BY XPS AND STATIC SIMS

被引：41
作者：
LEGGETT, GJ
RATNER, BD
VICKERMAN, JC
机构：
[1] UNIV WASHINGTON,NATL ESCA & SURFACE ANAL CTR BIOMED PROBLEMS,DEPT CHEM ENGN,BF-10,SEATTLE,WA 98195
[2] UMIST,DEPT CHEM,SURFACE ANAL RES CTR,MANCHESTER M60 1QD,ENGLAND
来源：
SURFACE AND INTERFACE ANALYSIS | 1995年 / 23卷 / 01期
关键词：
D O I：
10.1002/sia.740230104
中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
Plasma-polymerized styrene films were studied by static secondary ion mass spectrometry (SIMS) and x-ray photoelectron spectroscopy (XPS). The two techniques were found to yield complementary data regarding film chemical structure. Static SIMS proved to be highly sensitive to subtle changes in surface chemistry. For example, the static SIMS spectra exhibited features due to polymer cross-linking and unsaturation. X-ray photoelectron spectroscopy provided a good indication of the extent of oxygen incorporation into the plasma-deposited films and characterization of time-dependent changes in film composition.
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页码：22 / 28
页数：7
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