MICROSTRUCTURE OF CVD-SNO2 FILMS

被引：10
作者：
MANI, A
KARUPPIAH, N
MAHALINGAM, R
机构：
[1] Central Electrochemical Research Institute Karaikudi
来源：
MATERIALS RESEARCH BULLETIN | 1990年 / 25卷 / 06期
关键词：
19;
D O I：
10.1016/0025-5408(90)90209-K
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
The photo- as well as scanning electronmicroscopic (SEM) observations of chemical vapour deposited (CVD) tin oxide (SnO2) films are presented in this paper as part of the investigation of structure and structure-related electrocatalytic and transport properties of Sb-doped tin oxide (SnO2:Sb) films. The crystalline microstructures of the oxide films exhibit crystallographic twins of octahedral crystallites of different sizes and orientations. The deposits annealed at 1000°C for 0.5h indicate "softening" of the crystallites followed by formation of "porous" nature of defects on the octahedral crystal faces. © 1990.
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页码：799 / 806
页数：8
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