MORPHOLOGY AND STRUCTURE OF GOLD, SILVER AND COPPER LAYERS OBTAINED BY SPUTTERING DURING ION-BOMBARDMENT OF TARGETS FROM THESE METALS

被引：2
作者：
MARINOV, M
机构：
[1] Bulgarian Acad of Sciences, Sofia, Bulg, Bulgarian Acad of Sciences, Sofia, Bulg
来源：
THIN SOLID FILMS | 1988年 / 157卷 / 02期
关键词：
D O I：
10.1016/0040-6090(88)90012-0
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
8
引用
收藏
页码：315 / 323
页数：9
相关论文
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