THE DEPTH RESOLUTION OF SPUTTER PROFILING

被引：14

作者：

KING, BV ^{[1
]}

TSONG, IST ^{[1
]}

机构：

[1] ARIZONA STATE UNIV,DEPT PHYS,TEMPE,AZ 85287

来源：

ULTRAMICROSCOPY | 1984年 / 14卷 / 1-2期

关键词：

D O I：

10.1016/0304-3991(84)90109-8

中图分类号：

TH742 [显微镜];

学科分类号：

摘要：

引用

页码：75 / 78

页数：4

共 50 条

[1] DEPTH RESOLUTION OF SPUTTER PROFILING
ANDERSEN, HH
APPLIED PHYSICS, 1979, 18 (02): : 131 - 140
[2] DEPTH RESOLUTION IN SPUTTER PROFILING
HOFMANN, S
APPLIED PHYSICS, 1977, 13 (02): : 205 - 207
[3] THE DEPTH DEPENDENCE OF THE DEPTH RESOLUTION IN SPUTTER PROFILING
WERNER, HW
SURFACE AND INTERFACE ANALYSIS, 1982, 4 (01) : 1 - 7
[4] Depth resolution in sputter profiling revisited
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SURFACE AND INTERFACE ANALYSIS, 2016, 48 (13) : 1354 - 1369
[5] ON THE ESTIMATION OF DEPTH RESOLUTION DURING SPUTTER PROFILING
PETRAVIC, M
SVENSSON, BG
WILLIAMS, JS
APPLIED PHYSICS LETTERS, 1993, 62 (03) : 278 - 280
[6] INFLUENCE OF ION MIXING ON THE DEPTH RESOLUTION OF SPUTTER DEPTH PROFILING
CHENG, YT
DOW, AA
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[7] EFFECT OF ION MIXING ON THE DEPTH RESOLUTION OF SPUTTER DEPTH PROFILING
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APPLIED PHYSICS LETTERS, 1988, 53 (14) : 1346 - 1348
[8] IMPROVEMENT OF DEPTH RESOLUTION IN SPUTTER PROFILING BY COOLING SPECIMENS
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GOTO, K
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1983, 22 (08): : L547 - L549
[9] Analytical and numerical depth resolution functions in sputter profiling
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Liu, Y.
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Kovac, J.
APPLIED SURFACE SCIENCE, 2014, 314 : 942 - 955
[10] DEPTH RESOLUTION DURING SPUTTER PROFILING OF SI IN GAAS
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NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1994, 85 (1-4): : 388 - 390

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