SOFT-X-RAY LITHOGRAPHY USING RADIATION FROM LASER-PRODUCED PLASMAS

被引：25

作者：

GOHIL, P

KAPOOR, H

MA, D

PEKERAR, MC

MCILRATH, TJ

GINTER, ML

机构：

[1] UNIV MARYLAND,INST PHYS SCI & TECHNOL,COLLEGE PK,MD 20742

[2] USN,RES LAB,WASHINGTON,DC 20375

来源：

APPLIED OPTICS | 1985年 / 24卷 / 13期

关键词：

D O I：

10.1364/AO.24.002024

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

引用

页码：2024 / 2027

页数：4

共 9 条

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[4]

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[5] REPETITIVELY PULSED-PLASMA SOFT-X-RAY SOURCE [J].

NAGEL, DJ ;

BROWN, CM ;

PECKERAR, MC ;

GINTER, ML ;

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MCILRATH, TJ ;

CARROLL, PK .

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[6] SPECTRAL-IRRADIANCE CALIBRATION OF CONTINUUM EMITTED FROM RARE-EARTH PLASMAS [J].

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OTT, WR ;

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GINTER, M .

OPTICS LETTERS, 1982, 7 (01) :31-33

[7] RARE-EARTH PLASMA LIGHT-SOURCE FOR VUV APPLICATIONS [J].

OSULLIVAN, G ;

CARROLL, PK ;

MCILRATH, TJ ;

GINTER, ML .

APPLIED OPTICS, 1981, 20 (17) :3043-3046

[8]

TAYLOR GN, 1980, SOLID STATE TECHNOL, V23, P73

[9]

RADICHROMIC READER

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