PHOTOREFLECTANCE CHARACTERIZATION OF GAAS AS A FUNCTION OF TEMPERATURE, CARRIER CONCENTRATION, AND NEAR-SURFACE ELECTRIC-FIELD

被引:4
作者
BADAKHSHAN, A
DURBIN, C
GLOSSER, R
ALAVI, K
PATHAK, R
机构
[1] UNIV TEXAS,CTR APPL OPT,RICHARDSON,TX 75083
[2] UNIV TEXAS,CTR ADV ELECTRON DEVICES & SYST,ARLINGTON,TX 76010
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1993年 / 11卷 / 02期
关键词
D O I
10.1116/1.586698
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Previous measurements of the photoreflectance line shape of GaAs at the E1 transition (2-9 eV) were extended. This study covers the combined effect of temperature and carrier concentration along with a discussion of the effect of the electric field intensity and the field inhomogeneity within a depth of 20 nm from the surface. A systematic study of changes in the line shape of the above band gap transition, E1 as a function of temperature (80-400 K) and carrier concentration (CC) (2-200 X 10(16) cm-3) is presented and a model of the effect is discussed. It was found that as the carrier concentration increases beyond 1 X 10(17) cm-3, the line shape changes in phase and in broadening in a characteristic way which depends on CC and temperature. A simple correlation is established between both the broadening and the line shape rotation as a function of temperature and CC. Using the Schottky relation and Fermi-level pinning, the observed effect qualitatively was explained. Also the effect of near-surface electric field on the line shape is discussed. The observed effect may be applied as an optical measurement of the carrier concentration or possibly the electric field within a depth of congruent-to 20 nm from the surface/interface.
引用
收藏
页码:169 / 174
页数:6
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