SIMS EVALUATION OF CONTAMINATION ON ION-CLEANED (100) INP SUBSTRATES

被引：21

作者：

DOWSETT, MG ^{[1
]}

KING, RM ^{[1
]}

PARKER, EHC ^{[1
]}

机构：

[1] SIR JOHN CASS SCH SCI & TECHNOL,DEPT PHYS,LONDON EC3N 2EY,ENGLAND

来源：

APPLIED PHYSICS LETTERS | 1977年 / 31卷 / 08期

关键词：

D O I：

10.1063/1.89765

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：529 / 531

页数：3

共 13 条

[1] COMPOSITIONAL AND STRUCTURAL-CHANGES THAT ACCOMPANY THERMAL ANNEALING OF (100) SURFACES OF GAAS, INP AND GAP IN VACUUM [J].

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KIRK, DL .

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SURFACE SCIENCE, 1975, 53 (DEC) :596-625

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PARKER, EHC .

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[4]

DOWSETT MG, UNPUBLISHED

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[6]

FARROW RL, COMMUNICATION

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HIROFUJI, Y ;

GONDA, S ;

MUKAI, S ;

KIMATA, M .

JAPANESE JOURNAL OF APPLIED PHYSICS, 1976, 15 (12) :2321-2325

[8] MOLECULAR-BEAM EPITAXIAL-GROWTH OF INP [J].

MCFEE, JH ;

MILLER, BI ;

BACHMANN, KJ .

JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1977, 124 (02) :259-272

[9]

MEGGITT BT, UNPUBLISHED

[10] COMPOSITION OF BINARY-ALLOYS BY SIMULTANEOUS SIMS AND AES MEASUREMENTS [J].

NARUSAWA, T ;

SATAKE, T ;

KOMIYA, S .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1976, 13 (01) :514-518

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