COMPOSITION, STRUCTURE, AND AC CONDUCTIVITY OF RF-SPUTTERED CALCIA-STABILIZED ZIRCONIA THIN-FILMS

被引：40
作者：
CROSET, M
SCHNELL, JP
VELASCO, G
SIEJKA, J
机构：
[1] THOMSON CSF,CENT RECH LAB,F-91401 ORSAY,FRANCE
[2] UNIV PARIS 7,ECOLE NORMALE SUPER,PHYS SOLIDES GRP,F-75005 PARIS,FRANCE
来源：
JOURNAL OF APPLIED PHYSICS | 1977年 / 48卷 / 02期
关键词：
D O I：
10.1063/1.323669
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：775 / 780
页数：6
相关论文
共 50 条
[31]   PHYSICAL AND MICROMAGNETIC STRUCTURAL CHARACTERIZATIONS OF RF-SPUTTERED AMORPHOUS COZRNB THIN-FILMS [J].
CHOH, KK ;
JUDY, JH ;
SIVERTSEN, JM .
JOURNAL OF APPLIED PHYSICS, 1988, 64 (10) :5495-5497
[32]   ATOMIC DEFECTS AND STRESSES IN RF-SPUTTERED SIO2 THIN-FILMS [J].
SHABALOV, AL ;
FELDMAN, MS .
THIN SOLID FILMS, 1986, 143 (01) :83-90
[33]   STUDY OF THE COERCIVE POWER OF RF-SPUTTERED IRON-OXIDE THIN-FILMS [J].
YU, M ;
YOU, GJ ;
ZHOU, ZJ ;
LUO, HL .
CHINESE PHYSICS, 1988, 8 (03) :593-601
[34]   PIEZOELECTRIC THIN-FILMS OF RF-SPUTTERED BI12PBO19 [J].
MITSUYU, T ;
WASA, K ;
HAYAKAWA, S .
JOURNAL OF APPLIED PHYSICS, 1976, 47 (07) :2901-2902
[35]   ELECTRICAL-RESISTIVITY OF RF-SPUTTERED IRON-OXIDE THIN-FILMS [J].
MEI, Y ;
ZHOU, ZJ ;
LUO, HL .
JOURNAL OF APPLIED PHYSICS, 1987, 61 (08) :4388-4389
[36]   The effect of titania doping on structure and mechanical properties of calcia-stabilized zirconia ceramic [J].
Zhigachev, Andrey O. ;
Rodaev, Vyacheslav V. ;
Zhigacheva, Darya V. .
JOURNAL OF MATERIALS RESEARCH AND TECHNOLOGY-JMR&T, 2019, 8 (06) :6086-6093
[37]   ANODIC-OXIDATION OF NIOBIUM AND TANTALUM THROUGH THIN SOLID ELECTROLYTE FILMS OF CALCIA-STABILIZED ZIRCONIA (CSZ) [J].
PERRIERE, J ;
SIEJKA, J ;
CROSET, M .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1978, 125 (03) :C132-C133
[38]   Preparation and characterization of rf-sputtered Sr-doped lanthanum cuprate thin films on yttria-stabilized zirconia substrates [J].
Yu, HC ;
Chen, YH ;
Liao, CL ;
Fung, KZ .
JOURNAL OF ALLOYS AND COMPOUNDS, 2005, 395 (1-2) :286-290
[39]   HIGH DIELECTRIC-CONSTANT OF RF-SPUTTERED HFO2 THIN-FILMS [J].
HSU, CT ;
SU, YK ;
YOKOYAMA, M .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 1992, 31 (08) :2501-2504
[40]   DIRECTLY RF-SPUTTERED ALPHA-FE2O3 THIN-FILMS [J].
CHEN, GL ;
SIVERTSEN, JM ;
JUDY, JH .
IEEE TRANSACTIONS ON MAGNETICS, 1984, 20 (05) :827-829
12345