COMPOSITION, STRUCTURE, AND AC CONDUCTIVITY OF RF-SPUTTERED CALCIA-STABILIZED ZIRCONIA THIN-FILMS

被引：40
|
作者：
CROSET, M
SCHNELL, JP
VELASCO, G
SIEJKA, J
机构：
[1] THOMSON CSF,CENT RECH LAB,F-91401 ORSAY,FRANCE
[2] UNIV PARIS 7,ECOLE NORMALE SUPER,PHYS SOLIDES GRP,F-75005 PARIS,FRANCE
来源：
JOURNAL OF APPLIED PHYSICS | 1977年 / 48卷 / 02期
关键词：
D O I：
10.1063/1.323669
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：775 / 780
页数：6
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