AUTOMATIC CORRECTION FOR EFFECTS OF AUGER LINE-SHAPE CHANGES ON DEPTH PROFILES

被引：15
作者：
GRANT, JT
WOLFE, RG
HOOKER, MP
SPRINGER, RW
HAAS, TW
机构：
[1] UNIVERSAL ENERGY SYST INC,DAYTON,OH 45432
[2] USAF,MAT LAB,WRIGHT PATTERSON AFB,OH 45433
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1977年 / 14卷 / 01期
关键词：
D O I：
10.1116/1.569129
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：232 / 235
页数：4
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