THERMAL OXIDATION OF SILICON

被引：14

|

作者：

YEH, TH

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1962年 / 33卷 / 09期

关键词：

D O I：

10.1063/1.1702564

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

收藏

页码：2849 / &

相关论文

共 50 条

[1] On Silicon Carbide Thermal Oxidation
Benfdila, A.
Zekentes, K.
AFRICAN REVIEW OF PHYSICS, 2010, 4 : 25 - 30
[2] THERMAL-OXIDATION OF SILICON
MARSHALL, S
SOLID STATE TECHNOLOGY, 1981, 24 (06) : 71 - 71
[3] Model for Thermal Oxidation of Silicon
A. V. Fadeev
Yu. N. Devyatko
Technical Physics, 2019, 64 : 575 - 581
[4] THERMAL-OXIDATION OF SILICON
HESS, DW
CHEMICAL ENGINEERING EDUCATION IN A CHANGING ENVIRONMENT, 1988, : 349 - 360
[5] ACCELERATED THERMAL OXIDATION OF SILICON
KALLANDER, DA
FLASCHEN, SS
GNAEDINGER, RJ
LUFTY, CM
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1961, 108 (03) : C62 - C62
[6] Model for Thermal Oxidation of Silicon
Fadeev, A., V
Devyatko, Yu N.
TECHNICAL PHYSICS, 2019, 64 (04) : 575 - 581
[7] THE THERMAL-OXIDATION OF SILICON
DEAL, BE
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1982, 129 (03) : C101 - C101
[8] REMARKS ON THERMAL OXIDATION OF SILICON
MASER, K
ZEITSCHRIFT FUR PHYSIKALISCHE CHEMIE-LEIPZIG, 1971, 248 (1-2): : 42 - &
[9] INFLUENCE OF OXIDATION CONDITIONS ON THERMAL OXIDATION OF SILICON
DATHE, J
MULLER, W
ZEITSCHRIFT FUR ANGEWANDTE PHYSIK, 1968, 25 (06): : 341 - &
[10] SILICON OXIDATION STUDIES - SILICON ORIENTATION EFFECTS ON THERMAL-OXIDATION
IRENE, EA
MASSOUD, HZ
TIERNEY, E
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1986, 133 (06) : 1253 - 1256

← 1 2 3 4 5 →