3-DIMENSIONAL NUMERICAL MODELING OF HALL PLATES IN INHOMOGENEOUS MAGNETIC-FIELDS

The method of 2D device modeling with the finite-difference method is extended to three dimensions. The theory and the development of the simulation program for that purpose are described. After calculating the potential distribution in the entire volume of the Hall plate, the current density and the space charge are determined by using the known flux density distribution. The advantage of this procedure is the ability to handle extremely inhomogeneous fields of magnetic flux density. The first example, presented in this work, shows the correct function of the simulator. Two further examples demonstrate results, which are calculable with a 3D-formulation only.