DEPOSITION OF LAMO(3) (M=NI, CO, CR, AL)-ORIENTED FILMS BY SPRAY COMBUSTION-FLAME TECHNIQUE

LaMO(3) (M = Ni, Co, Cr, Al) films were prepared on sintered alumina, sapphire (001) and MgO(100) at 500-900 degrees C by spraying ultrasonically atomized aqueous solutions of nitrates into a combustion flame (spray combustion flame technique). LaNiO3 and LaCoO3 on MgO(100) crystallized in high-temperature phases (cubic) while LaCrO3 and LaAlO3 crystallized in room-temperature phases. LaMO(3) (M = Ni, Co, Cr, Al) films on MgO(100) were highly oriented to (100), (100), (001) and (100), respectively, while the films on sintered alumina and sapphire were not. The electric resistivities of the dense LaMO(3) (M = Ni, Ca, Cr) films were as low as those of bulk ceramics. LaNiO3 film deposited on MgO above 700 degrees C showed the lowest resistivity of about 6 x 10(-6) Omega m. It was suggested that the reactivities of the constituent metal atoms with OH in the flame are associated with the preferred phase and the morphology of the films.