SPUTTERING OF SOLID SO2

被引：43

作者：

BORING, JW ^{[1
]}

GARRETT, JW ^{[1
]}

CUMMINGS, TA ^{[1
]}

JOHNSON, RE ^{[1
]}

BROWN, WL ^{[1
]}

机构：

[1] BELL TEL LABS INC, MURRAY HILL, NJ 07974 USA

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1984年 / 1卷 / 2-3期

关键词：

D O I：

10.1016/0168-583X(84)90087-9

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：321 / 326

页数：6

共 22 条

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[2]

BORING JW, 1983, UNPUB NUCL INSTR MET

[3]

BROWN WL, 1980, PHYS REV LETT, V45, P1632, DOI 10.1103/PhysRevLett.45.1632

[4] SPUTTERING OF ICE BY MEV LIGHT-IONS [J].

BROWN, WL ;

LANZEROTTI, LJ ;

POATE, JM ;

AUGUSTYNIAK, WM .

PHYSICAL REVIEW LETTERS, 1978, 40 (15) :1027-1030

[5]

BROWN WL, 1982, NUCL INSTRUM METHODS, V193, P1

[6] SPUTTERING FROM ELASTIC-COLLISION SPIKES - SPHERICAL GEOMETRY [J].

CLAUSSEN, C .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH, 1982, 194 (1-3) :567-571

[7]

GARRETT JW, THESIS U VIRGINIA CH

[8]

JOHNSON RE, 1982, INTRO ATOMIC MOL COL, P239

[9]

JOHNSON RE, NUCL INSTR METH

[10]

JOHNSON RE, 1983, UNPUB J GEOPHYS RES

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