AN X-RAY STEPPER FOR SYNCHROTRON RADIATION LITHOGRAPHY

被引：12
|
作者：
KOUNO, E [1 ]
TANAKA, Y [1 ]
IWATA, J [1 ]
TASAKI, Y [1 ]
KAKIMOTO, E [1 ]
OKADA, K [1 ]
SUZUKI, K [1 ]
FUJII, K [1 ]
NOMURA, E [1 ]
机构：
[1] NEC CORP,MICROELECTR RES LABS,MIYAMAE KU,KAWASAKI 213,JAPAN
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1988年 / 6卷 / 06期
关键词：
D O I：
10.1116/1.584101
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
引用
收藏
页码：2135 / 2138
页数：4
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