SURFACE AND THIN-FILM ANALYSIS OF SEMICONDUCTOR-MATERIALS

被引：67

作者：

HONIG, RE ^{[1
]}

机构：

[1] RCA LABS,PRINCETON,NJ 08540

来源：

关键词：

D O I：

10.1016/0040-6090(76)90356-4

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：89 / 122

页数：34

共 56 条

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