THE DEPENDENCE OF ALUMINUM NITRIDE FILM CRYSTALLOGRAPHY ON SPUTTERING PLASMA COMPOSITION

被引：65
作者：
AITA, CR [1 ]
GAWLAK, CJ [1 ]
机构：
[1] UNIV WISCONSIN, DEPT MAT, MILWAUKEE, WI 53201 USA
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A | 1983年 / 1卷 / 02期
关键词：
D O I：
10.1116/1.571930
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
引用
收藏
页码：403 / 406
页数：4
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共 32 条
[1]   DEPOSITION RATE OF METALLIC THIN-FILMS IN REACTIVE SPUTTERING PROCESS [J].
ABE, T ;
YAMASHINA, T .
THIN SOLID FILMS, 1975, 30 (01) :19-27
[2]   BASAL ORIENTATION ALUMINUM NITRIDE GROWN AT LOW-TEMPERATURE BY RF DIODE SPUTTERING [J].
AITA, CR .
JOURNAL OF APPLIED PHYSICS, 1982, 53 (03) :1807-1808
[3]   THE EFFECT OF O-2 ON REACTIVELY SPUTTERED ZINC-OXIDE [J].
AITA, CR ;
PURDES, AJ ;
LAD, RJ ;
FUNKENBUSCH, PD .
JOURNAL OF APPLIED PHYSICS, 1980, 51 (10) :5533-5536
[4]   GLOW-DISCHARGE MASS-SPECTROMETRY OF SPUTTERED TANTALUM NITRIDE [J].
AITA, CR ;
MYERS, TA ;
LAROCCA, WJ .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1981, 18 (02) :324-327
[5]   ENHANCEMENT OF TA+ FLUX BY SUBSTRATE BIASING DURING SPUTTER DEPOSITION OF TANTALUM NITROGEN FILMS [J].
AITA, CR ;
MYERS, TA .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1983, 1 (02) :348-351
[6]   THE EFFECT OF RF POWER ON REACTIVELY SPUTTERED ZINC-OXIDE [J].
AITA, CR ;
LAD, RJ ;
TISONE, TC .
JOURNAL OF APPLIED PHYSICS, 1980, 51 (12) :6405-6410
[7]   PLASMA DIAGNOSTICS OF AN RF-SPUTTERING GLOW DISCHARGE [J].
COBURN, JW ;
KAY, E .
APPLIED PHYSICS LETTERS, 1971, 18 (10) :435-&
[8]   GLOW-DISCHARGE MASS-SPECTROMETRY - TECHNIQUE FOR DETERMINING ELEMENTAL COMPOSITION PROFILES IN SOLIDS [J].
COBURN, JW ;
TAGLAUER, E ;
KAY, E .
JOURNAL OF APPLIED PHYSICS, 1974, 45 (04) :1779-1786
[9]   MASS-SPECTROMETRIC STUDY OF NEUTRAL-SPUTTERED SPECIES IN AN RF GLOW-DISCHARGE SPUTTERING SYSTEM [J].
COBURN, JW ;
ECKSTEIN, EW ;
KAY, E .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1975, 12 (01) :151-154
[10]   DC CATHODE SPUTTERING - INFLUENCE OF OXYGEN-CONTENT IN GAS-FLOW ON DISCHARGE CURRENT [J].
GORANCHEV, B ;
ORLINOV, V ;
POPOVA, V .
THIN SOLID FILMS, 1976, 33 (02) :173-183
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