KINETICS OF COMPOUND FORMATION IN THIN-FILM COUPLES OF AL AND TRANSITION-METALS

被引：107

作者：

HOWARD, JK

LEVER, RF

SMITH, PJ

HO, PS

机构：

[1] IBM CORP,SYST PROD DIV,HOPEWELL JUNCTION,NY 12533

[2] IBM CORP,RES DIV,YORKTOWN HTS,NY 10598

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1976年 / 13卷 / 01期

关键词：

D O I：

10.1116/1.568959

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：68 / 71

页数：4

共 15 条

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MAYER, JW ;

NICOLET, MA ;

BUCK, TM ;

AMSEL, G ;

EISEN, F .

THIN SOLID FILMS, 1973, 17 (01) :1-41

[5]

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[7] SOME ASPECTS OF THE GROWTH OF DIFFUSION LAYERS IN BINARY SYSTEMS [J].

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[8]

LEVER RF, 1975, SEP INT C ION BEAM S

[9] ANALYSIS OF THIN-FILM STRUCTURES WITH NUCLEAR BACKSCATTERING AND X-RAY-DIFFRACTION [J].

MAYER, JW ;

TU, KN .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1974, 11 (01) :86-93

[10]

Pratt J.N., 1951, J I MET, V80, P449

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