INSITU OBSERVATION OF TANTALUM THIN-FILM OXIDATION

被引:0
|
作者
LUGOMER, S [1 ]
KERENOVIC, M [1 ]
STIPANCIC, M [1 ]
机构
[1] ELECTR FAC BANJA LUKA, Banja Luka, YUGOSLAVIA
来源
ACTA CRYSTALLOGRAPHICA A-FOUNDATION AND ADVANCES | 1984年 / 40卷
关键词
D O I
10.1107/S0108767384094125
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
引用
收藏
页码:C193 / C193
页数:1
相关论文
共 50 条
  • [21] TANTALUM THIN-FILM CAPACITORS WITH VARIOUS TYPES OF COUNTERELECTRODES
    FERRARIS, GP
    MAY, R
    ELECTROCOMPONENT SCIENCE AND TECHNOLOGY, 1980, 6 (3-4): : 235 - 240
  • [22] Evaluation of residual stress in sputtered tantalum thin-film
    Al-masha'al, Asa'ad
    Bunting, Andrew
    Cheung, Rebecca
    APPLIED SURFACE SCIENCE, 2016, 371 : 571 - 575
  • [23] Tantalum Thin-Film Superconducting Transition Edge Thermometers
    Masoud Mohazzab
    Norbert Mulders
    Al Nash
    Melora Larson
    Journal of Low Temperature Physics, 2000, 121 : 821 - 824
  • [24] HEATING STAGE FOR INSITU STUDIES OF THIN-FILM REACTIONS
    SCHWARZ, RB
    RUBIN, JB
    REVIEW OF SCIENTIFIC INSTRUMENTS, 1993, 64 (05): : 1292 - 1295
  • [25] A NOVEL TECHNIQUE FOR INSITU MEASUREMENTS OF THIN-FILM PROPERTIES
    HIEBER, K
    THIN SOLID FILMS, 1985, 130 (1-2) : 125 - 134
  • [26] INSITU MAGNETIZATION LOOP TRACER FOR THIN-FILM GROWTH
    HAUGDAHL, JB
    MILLER, DR
    REVIEW OF SCIENTIFIC INSTRUMENTS, 1988, 59 (03): : 480 - 483
  • [27] INSITU PHOTOCONDUCTIVE MONITORING OF PHTHALOCYANINE THIN-FILM GROWTH
    MINAMI, N
    ASAI, M
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1991, 30 (4A): : L643 - L646
  • [28] INSITU MEASUREMENTS OF THE STRESS CHANGES IN THIN-FILM ELECTRODES
    SCARMINIO, J
    SAHU, SN
    DECKER, F
    JOURNAL OF PHYSICS E-SCIENTIFIC INSTRUMENTS, 1989, 22 (09): : 755 - 757
  • [29] INSITU ELECTRON-MICROSCOPY OF THIN-FILM GROWTH
    POCZA, JF
    BARNA, A
    BARNA, PB
    POZSGAI, I
    RADNOCZI, G
    JAPANESE JOURNAL OF APPLIED PHYSICS, 1974, : 525 - 532
  • [30] METAL PROPERTIES AND THIN-FILM OXIDATION
    CHATTERJEE, B
    THIN SOLID FILMS, 1976, 35 (03) : 397 - 404