SURFACE-REACTION ENHANCEMENT VIA LOW-ENERGY ELECTRON-BOMBARDMENT AND SECONDARY-ELECTRON EMISSION

被引:28
作者
KUNZ, RR
MAYER, TM
机构
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1987年 / 5卷 / 01期
关键词
D O I
10.1116/1.583919
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
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页码:427 / 429
页数:3
相关论文
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