ELECTRON-CYCLOTRON-RESONANT MICROWAVE PLASMA SYSTEM FOR THIN-FILM DEPOSITION

被引：20

作者：

MEJIA, SR

MCLEOD, RD

KAO, KC

CARD, HC

机构：

来源：

REVIEW OF SCIENTIFIC INSTRUMENTS | 1986年 / 57卷 / 03期

关键词：

D O I：

10.1063/1.1138915

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

收藏

页码：493 / 496

页数：4

相关论文

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[J]. JOURNAL OF NON-CRYSTALLINE SOLIDS, 1983, 59-6 (DEC) : 727 - 730
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