ELECTRICAL-PROPERTIES OF IN0.53GA0.47AS LAYERS FORMED BY ION-IMPLANTATION AND RAPID THERMAL (FLASH) ANNEAL

被引:0
作者
LIU, SG
NARAYAN, SY
MAGEE, CW
WU, CP
KOLONDRA, F
PACZKOWSKI, JP
CAPEWELL, DR
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RCA REVIEW | 1986年 / 47卷 / 04期
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TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
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页码:518 / 535
页数:18
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