GAAS-ALGAAS HBT WITH CARBON DOPED BASE LAYER GROWN BY MOMBE

被引:35
作者
REN, F
ABERNATHY, CR
PEARTON, SJ
FULLOWAN, TR
LOTHIAN, J
JORDAN, AS
机构
[1] AT & T Bell Laboratories, Murray Hill
关键词
Microwave devices and components; Semiconductor devices and materials;
D O I
10.1049/el:19900472
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
The first demonstration of GaAs/AlGaAs HBTs grown completely by metal organic molecularbeam epitaxy (MOMBE) is reported. The The p-typedopant used for the base layer was carbon. Tin was used as the n-type dopant for the emitter as well as the collector. A common-emitter current gain of 140 was measured for 90 µm diameter devices with a base doping of 1 × 1019cm-3. Small area (2 × 6µm2), devices show a current gain cut-off frequency of ~40 GHz. © 1990, The Institution of Electrical Engineers. All rights reserved.
引用
收藏
页码:724 / 725
页数:2
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