GAIN MEASUREMENTS IN ARF AND KRF EXCIMER DISCHARGES USING AXIAL AND SIDELIGHT FLUORESCENCE DETECTION

被引:13
作者
ANDREW, JE [1 ]
DYER, PE [1 ]
机构
[1] UNIV HULL,DEPT APPL PHYS,HULL HU6 7RX,N HUMBERSIDE,ENGLAND
关键词
D O I
10.1016/0030-4018(85)90013-6
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
LASERS, GAS
引用
收藏
页码:117 / 120
页数:4
相关论文
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