ELECTRON-BEAM TESTING OF INTEGRATED-CIRCUITS THROUGH INSULATING LAYERS - ERROR CORRECTION BY NUMERICAL-SIMULATION

被引：0
|
作者：
FREMONT, H [1 ]
TOUBOUL, A [1 ]
DANTO, Y [1 ]
机构：
[1] UNIV BORDEAUX 1,ENSERB,IXL,CNRS,URA 846,F-33405 TALENCE,FRANCE
来源：
REVUE DE PHYSIQUE APPLIQUEE | 1990年 / 25卷 / 06期
关键词：
D O I：
10.1051/rphysap:01990002506049900
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：499 / 507
页数：9
相关论文
共 45 条
  • [1] ELECTRON-BEAM TESTING OF INTEGRATED-CIRCUITS
    REHME, H
    PHYSICS IN TECHNOLOGY, 1979, 10 (03): : 97 - 103
  • [2] FUNDAMENTALS OF ELECTRON-BEAM TESTING OF INTEGRATED-CIRCUITS
    MENZEL, E
    KUBALEK, E
    SCANNING, 1983, 5 (03) : 103 - 122
  • [3] TECHNIQUES FOR ELECTRON-BEAM TESTING AND RESTRUCTURING INTEGRATED-CIRCUITS
    SHAVER, DC
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1981, 19 (04): : 1010 - 1013
  • [4] ELECTRON-BEAM TESTING OF INTEGRATED-CIRCUITS WITH MULTILEVEL METAL
    RADZIMSKI, ZJ
    RICKS, DA
    WOLCOTT, JS
    RUSSELL, PE
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1990, 8 (06): : 2037 - 2040
  • [5] NUMERICAL SIMULATIONS TO IMPROVE THE ACCURACY OF ELECTRON-BEAM TESTING ON PASSIVATED INTEGRATED-CIRCUITS
    FREMONT, H
    TOUBOUL, A
    GOBLED, D
    DANTO, Y
    JOURNAL DE PHYSIQUE, 1988, 49 (C-4): : 149 - 152
  • [6] ELECTRON-BEAM PROBING OF INTEGRATED-CIRCUITS
    MENZEL, E
    BUCHANAN, R
    SOLID STATE TECHNOLOGY, 1985, 28 (12) : 63 - 70
  • [7] NUMERICAL-SIMULATION OF RESISTIVE INTERCONNECTS FOR INTEGRATED-CIRCUITS
    WALTON, AJ
    HOLWILL, RJ
    ROBERTSON, JM
    IEEE JOURNAL OF SOLID-STATE CIRCUITS, 1985, 20 (06) : 1252 - 1258
  • [8] COMPUTER-SIMULATION AND EXPERIMENTAL PERFORMANCE DATA FOR AN ELECTRON SPECTROMETER FOR ELECTRON-BEAM TESTING OF INTEGRATED-CIRCUITS
    DEUTGES, D
    GORLICH, S
    KUBALEK, E
    SCANNING ELECTRON MICROSCOPY, 1986, 1986 : 45 - 56
  • [9] ELECTRON-BEAM TEST TECHNIQUES FOR INTEGRATED-CIRCUITS
    MENZEL, E
    KUBALEK, E
    SCANNING ELECTRON MICROSCOPY, 1981, : 305 - 322
  • [10] ELECTRON-BEAM SYSTEM TO FABRICATE INTEGRATED-CIRCUITS
    ANGELLO, SJ
    JOURNAL OF THE FRANKLIN INSTITUTE-ENGINEERING AND APPLIED MATHEMATICS, 1973, 296 (06): : 403 - &
12345