ADVANCED SUB-MICRON RESEARCH AND TECHNOLOGY DEVELOPMENT AT THE NATIONAL SUB-MICRON FACILITY

被引：4
|
作者：
WOLF, ED
机构：
来源：
PROCEEDINGS OF THE IEEE | 1983年 / 71卷 / 05期
关键词：
D O I：
10.1109/PROC.1983.12643
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
引用
收藏
页码：589 / 600
页数：12
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